ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,716, issued on Feb. 10, was assigned to Intel Corp. (Santa Clara, Calif.).
"Patterning metal features on a substrate" was invented by Shafaat Ahmed (Albuquerque, N.M.) and Greg Herdt (Rio Rancho, N.M.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein may be related to apparatuses, processes, and techniques related to patterning and metallization to produce metal features on a substrate that have pitches less than 26 nm. Other embodiments may be described and/or claimed."
The patent was filed on Dec. 24, 2021, under Application No. 17/561,727.
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