ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,775,209, issued on Oct. 27, was assigned to Inpria Corp. (Corvallis, Ore.).
"Stability-enhanced organotin photoresist compositions" was invented by Kai Jiang (Corvallis, Ore.), Alan J. Telecky (Albany, Ore.) and Stephen T. Meyers (Corvallis, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An organotin precursor solution is described comprising an organic solvent, an optional additive, and an organotin composition represented by one or more organotin compounds represented by the formula RSnL3, wherein each R is independently a hydrocarbyl ligand having from 1 to 31 carbon atoms and each L is independently a hydrolysable ligand, wherein the total conc...