US Patent Issued to Inficon on March 17 for "System and method for mass flow measurement and control of process gases in a carrier stream using one or more quartz crystal microbalance sensors" (California, New York, Oregon Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,577,675, issued on March 17, was assigned to Inficon Inc. (East Syracuse, N.Y.).

"System and method for mass flow measurement and control of process gases in a carrier stream using one or more quartz crystal microbalance sensors" was invented by Steve Lakeman (Newbury Park, Calif.), Mohamed Rinzan (Manlius, N.Y.), Chunhua Song (Jamesville, N.Y.) and Lukas Baumgartel (Portland, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for monitoring precursor material in a carrier stream of a fabrication system comprises depositing a film of precursor material on a surface of a QCM sensor and determining a starting resonance frequency of the QCM sens...