US Patent Issued to INFICON on July 21 for "Device for leakage detection via mass spectrometry, having a three-stage turbomolecular pump and a booster pump" (German Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,687,449, issued on July 21, was assigned to INFICON GMBH (Cologne, Germany).

"Device for leakage detection via mass spectrometry, having a three-stage turbomolecular pump and a booster pump" was invented by Silvio Decker (Cologne, Germany) and Simon Mathioudakis (Cologne, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A device for leak detection on a test specimen, comprising a mass spectrometer (12), an at least three-stage turbomolecular pump (14), the input stage (18) of which is connected to the mass spectrometer (12) and which has a first intermediate gas inlet arranged between the input pump stage and the intermediate pump stage (26) and a...