US Patent Issued to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH on May 12 for "Aberration corrector, a charged particle beam apparatus, a method of aligning an aberration corrector and a method of correcting aberration of a charged particle beam" (German Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,626,881, issued on May 12, was assigned to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH (Heimstetten, Germany).

"Aberration corrector, a charged particle beam apparatus, a method of aligning an aberration corrector and a method of correcting aberration of a charged particle beam" was invented by Florian Lampersberger (Munich), John Breuer (Munich) and Matthias Firnkes (Walpertskirchen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "An aberration corrector. The aberration corrector including a first plurality of magnetic elements, each magnetic element comprising a magnetic pole and a corresponding magnetic rod for pro...