US Patent Issued to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH on July 28 for "Method of determining a beam convergence of a charged particle beam, and charged particle beam system" (German Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,050, issued on July 28, was assigned to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH (Heimstetten, Germany).

"Method of determining a beam convergence of a charged particle beam, and charged particle beam system" was invented by Dominik Ehberger (Ebersberg, Germany) and John Breuer (Munich).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of determining a beam convergence of a charged particle beam (11) focused by a focusing lens (120) toward a sample (10) in a charged particle beam system (100), comprising: (a) taking one or more images (h1.. N) of the sample when the sample is arranged at one or more defocus dist...