US Patent Issued to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH on Feb. 24 for "Method of determining an energy spectrum or energy width of a charged particle beam, and charged particle beam imaging device" (German Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,562,338, issued on Feb. 24, was assigned to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH (Heimstetten, Germany).

"Method of determining an energy spectrum or energy width of a charged particle beam, and charged particle beam imaging device" was invented by John Breuer (Munich) and Dominik Ehberger (Ebersberg, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of determining an energy spectrum or energy width of a charged particle beam (11) focused by a focusing lens (120) toward a sample plane (pS) in a charged particle beam imaging device is described. The method includes (a) introducing an energy-dependent def...