US Patent Issued to Ichor Systems on June 9 for "Fluid delivery module" (California, Minnesota, Texas Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,652,983, issued on June 9, was assigned to Ichor Systems Inc..

"Fluid delivery module" was invented by Philip Ryan Barros (Pleasanton, Calif.), Greg Patrick Mulligan (Milpitas, Calif.), Dustin Tomhave (Sartell, Minn.) and Christopher Bryant Davis (Georgetown, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. In an effort to improve packaging density, fluid delivery module...