US Patent Issued to Ichor Systems on Aug. 18 for "Fluid delivery system" (California, Minnesota, Texas Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,710,773, issued on Aug. 18, was assigned to Ichor Systems Inc..

"Fluid delivery system" was invented by Philip Ryan Barros (Pleasanton, Calif.), Greg Patrick Mulligan (Milpitas, Calif.), Dustin Tomhave (Sartell, Minn.) and Christopher Bryant Davis (Georgetown, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems for processing articles are essential for semiconductor fabrication. In one embodiment, a system is disclosed comprising a plurality of fluid supplies configured to supply process fluids, a plurality of apparatuses for controlling flow, a plurality of mounting substrates, a vacuum manifold fluidly coupled to the plurality of mounting sub...