US Patent Issued to Hongik University Industry-Academia Cooperation Foundation on July 14 for "Measurement system for process monitoring" (South Korean Inventor)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,680,920, issued on July 14, was assigned to Hongik University Industry-Academia Cooperation Foundation (Seoul, South Korea).

"Measurement system for process monitoring" was invented by Jung Hwan Seo (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A measurement system for measuring a status of a process of a treatment apparatus for treating a component in a chamber to generate a gas mixture including gaseous phase materials includes a sampling unit configured to selectively communicate an exhaust pipe for discharging the gas mixture including the gaseous phase materials from the chamber to sample the gas mixture from the exhaust pipe a...