US Patent Issued to Hitachi High-Tech on Sept. 15 for "Charged particle beam device and specimen observation method" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,442, issued on Sept. 15, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Charged particle beam device and specimen observation method" was invented by Masahiro Fukuta (Tokyo), Tomoyo Sasaki (Tokyo), Makoto Suzuki (Tokyo), Masashi Wada (Tokyo) and Hiroshi Nishihama (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention overcomes a trade-off between throughput, SNR, and spatial resolution in a charged particle beam device. Accordingly, a computer 18 sets at least one of a charged particle optical system and a detection system so as to modulate the intensity of signal charged particles or an electromagnetic wave detected by a de...