US Patent Issued to Hitachi High-Tech on Sept. 15 for "Charged particle beam apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,451, issued on Sept. 15, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Charged particle beam apparatus" was invented by Hideki Tsushima (Tokyo) and Naoya Ishigaki (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam device according to the present invention comprises a charged particle source that emits charged particles, a detection circuit that detects electrons which are generated by a sample as a result of irradiation with the charged particles, and a power storage device (107_VHD) that holds direct voltage, and comprises a charge circuit (107_CHG) that charges the power storage device with supplied voltage, and a c...