US Patent Issued to Hitachi High-Tech on June 23 for "Charged particle beam system" (Japanese Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,161, issued on June 23, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Charged particle beam system" was invented by Heita Kimizuka (Tokyo), Natsuki Tsuno (Tokyo), Yasuhiro Shirasaki (Tokyo) and Minami Uchiho (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "An object of the present disclosure is to provide a charged particle beam system capable of obtaining information about a sample by using a feature amount on an observed image caused by light interference, light diffraction, light standing waves, and the like caused by irradiating a sample with light, and the like. In the charged particle beam system according to the present disclosure, a...