US Patent Issued to Hitachi High-Tech on Feb. 24 for "Structure estimation system and structure estimation program for estimating height of structure based on data from charged particle beam device" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,561,823, issued on Feb. 24, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Structure estimation system and structure estimation program for estimating height of structure based on data from charged particle beam device" was invented by Muneyuki Fukuda (Tokyo), Yasutaka Toyoda (Tokyo), Ryou Yumiba (Tokyo), Shuyang Dou (Tokyo), Ayumi Doi (Tokyo) and Junichi Tanaka (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a system and a non-transitory computer-readable medium for estimating the height of foreign matter, etc. adhering to a sample. In order to achieve the abovementioned purpose, proposed is a system, etc. in ...