ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,555,737, issued on Feb. 17, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Charged particle beam device" was invented by Yusuke Abe (Tokyo), Yusuke Nakamura (Tokyo), Shunsuke Mizutani (Tokyo) and Muneyuki Fukuda (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a charged particle beam device that can impart a function of an energy filter to even a small BSE detector. The charged particle beam device includes a fluorescent substance that converts charged particles generated by irradiation of a sample with a charged particle beam into light; a detector that detects the light emitted from the fluorescent substance; a light guide element ...