ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,400,826, issued on Aug. 26, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Charged particle beam device" was invented by Hironori Ogawa (Tokyo), Masaki Mizuochi (Tokyo), Motohiro Takahashi (Tokyo) and Takanori Kato (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam device according to the present invention includes a first movement table and a second movement table disposed above the first movement table, measures a first relative position between a sample chamber and the first movement table, a second relative position between the sample chamber and the second movement table, and a third relative position between a lens ba...