US Patent Issued to HITACHI HIGH-TECH on April 7 for "Charged particle beam apparatus and processor system" (Japanese Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,597,584, issued on April 7, was assigned to HITACHI HIGH-TECH Corp. (Tokyo).

"Charged particle beam apparatus and processor system" was invented by Akio Yamamoto (Tokyo), Wen Li (Tokyo), Shunsuke Mizutani (Tokyo) and Naoya Ishigaki (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a technique capable of reducing deterioration of a back scattered electron (BSE) detector caused by a dark pulse. Charged particle beam apparatus includes: a plurality of BSE detectors configured to detect a BSE from a sample; and a controller. The controller acquires, within a period, a first peak time of a first peak included in an output signal from a ...