ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,698,240, issued on Aug. 4, was assigned to Heraeus Covantics North America LLC (Chandler, Ariz.).
"Plasma resistant yttrium aluminum oxide body" was invented by Luke Walker (Chandler, Ariz.), Saurav Bista (Chandler, Ariz.), Matthew Joseph Donelon (Chandler, Ariz.) and Steven Roger Kennedy (Chandler, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17...