ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,956, issued on Aug. 4, was assigned to Hanwha Solutions Corp. (Seoul, South Korea).
"Wafer boat and plate for wafer boat" was invented by Kyoungsup Shin (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer boat according to an aspect of the present invention includes: at least one plate on which a plurality of wafers are loaded; and a plurality of pin pairs that are arranged along a first direction from the at least one plate and respectively support corresponding wafers among the plurality of wafers."
The patent was filed on Jan. 5, 2022, under Application No. 18/258,420.
*For further information, including images, chart...