US Patent Issued to HANWHA PRECISION MACHINERY on June 16 for "Gas injection apparatus for layer deposition" (South Korean Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,655,522, issued on June 16, was assigned to HANWHA PRECISION MACHINERY Co. LTD. (Seoul, South Korea).

"Gas injection apparatus for layer deposition" was invented by Sang Bo Kim (Seoul, South Korea), Su Woong Kim (Seoul, South Korea) and Seung Dae Choi (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas injection apparatus includes a supply block including central gas ports configured to supply a process gas provided from a gas supply source; a diffusion cover under the supply block and including a branch duct which is connected to the central gas ports; a plurality of spray nozzles on a lower surface of the diffusion cover and conne...