ALEXANDRIA, Va., July 15 -- United States Patent no. 12,662,373, issued on June 23, was assigned to HAMAMATSU PHOTONICS K.K. (Hamamatsu, Japan).
"Method for manufacturing mirror device" was invented by Tomoyuki Ide (Hamamatsu, Japan), Daiki Suzuki (Hamamatsu, Japan) and Mikito Takahashi (Hamamatsu, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a mirror device is a method for manufacturing a mirror device including a structural body that includes a support portion, a movable portion, and a coupling portion, and a mirror layer provided on the movable portion. The method for manufacturing a mirror device includes: a first forming step of forming a plurality of parts on a wafer,...