US Patent Issued to GREEN RESOURCE on March 24 for "Chamber coating material and method for manufacturing the same" (South Korean Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,584,236, issued on March 24, was assigned to GREEN RESOURCE Co. LTD. (Incheon, South Korea).

"Chamber coating material and method for manufacturing the same" was invented by Jong Beom Lee (Incheon, South Korea), Jong Soo Lee (Incheon, South Korea) and Byounggook Kwon (Incheon, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a coating material formed on an inner surface of a chamber is provided. The method includes: i) providing a substrate including at least one material selected from the group consisting of SiC, SiO2, and Al2O3; ii) providing a first coating portion including SiOx (0.1less than equal toxless than ...