US Patent Issued to GlobalFoundries U.S. on Sept. 9 for "Semiconductor structure with frontside port and cavity features for conveying sample to sensing element" (Vermont Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,105, issued on Sept. 9, was assigned to GlobalFoundries U.S. Inc. (Malta, N.Y.).

"Semiconductor structure with frontside port and cavity features for conveying sample to sensing element" was invented by Mark D. Levy (Williston, Vt.), Siva P. Adusumilli (South Burlington, Vt.) and Laura J. Silverstein (Richmond, Vt.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A structure includes a lab-on-chip (LOC) sensor and frontside port and cavity features for conveying a flowable sample (fluid or gas) to a sensing element of the sensor. The cavity is confined within middle of the line (MOL) dielectric layer(s). Alternatively, the cavity includes a lower sec...