ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,406,889, issued on Sept. 2, was assigned to Gigaphoton Inc. (Tochigi, Japan).
"Electronic device manufacturing method" was invented by Toshihiro Oga (Oyama, Japan), Koichi Fujii (Oyama, Japan) and Osamu Wakabayashi (Oyama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electronic device manufacturing method according to an aspect of the present disclosure includes determining magnification in a scanning width direction based on a pattern formed in a scanning field of a wafer; measuring a wafer height at points in the scanning field and determining an average value of the wafer height in the scanning width direction; determining a wavelength ran...