US Patent Issued to Gigaphoton on March 17 for "Tilt stage, extreme ultraviolet light generation apparatus, and electronic device manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,585, issued on March 17, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Tilt stage, extreme ultraviolet light generation apparatus, and electronic device manufacturing method" was invented by Takuya Ishii (Oyama, Japan), Yuto Tanaka (Oyama, Japan) and Shinichi Hagiwara (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A tilt stage includes a mounting table on which a target supply device supplying a target to a predetermined region in a chamber is mounted, a rotation support portion supporting the mounting table rotatably about at least first and second axes, a first tilt support portion including a first ball and a first contact sur...