US Patent Issued to GIGAPHOTON on March 17 for "EUV light generation apparatus and electronic device manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,656, issued on March 17, was assigned to GIGAPHOTON INC. (Tochigi, Japan).

"EUV light generation apparatus and electronic device manufacturing method" was invented by Yusuke Hoshino (Tochigi, Japan) and Yukio Watanabe (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An EUV light generation apparatus includes a chamber having internal pressure maintained below atmospheric pressure; a first bellows pipe having one end connected to the chamber; a first cover member which seals the other end under atmospheric pressure; a holder connected to the first cover member and arranged inside the chamber in a state of holding an optical element; a ...