US Patent Issued to Gigaphoton on Feb. 17 for "EUV light generation apparatus and electronic device manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,554,202, issued on Feb. 17, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"EUV light generation apparatus and electronic device manufacturing method" was invented by Tomoyoshi Toida (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An EUV light generation apparatus includes a chamber; a target supply device supplying a first target; a laser device outputting first pulse laser light to be incident on the first target, outputting second pulse laser light to be incident on a second target, and adjusting a control parameter correlated with a shape of plasma generated by the second pulse laser light being incident on the second target; an EUV ...