US Patent Issued to Gigaphoton on Dec. 23 for "Extreme ultraviolet light generation chamber device and electronic device manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,504,694, issued on Dec. 23, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Extreme ultraviolet light generation chamber device and electronic device manufacturing method" was invented by Yoshiyuki Honda (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An extreme ultraviolet light generation chamber device includes a chamber generating, at an internal space thereof, extreme ultraviolet light by irradiating a droplet target of tin with laser light to turn the droplet target into plasma; a target supply unit supplying the droplet target into the internal space; an extreme ultraviolet light concentrating mirror arranged in the internal space...