ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,407,322, issued on Sept. 2, was assigned to Georgia Tech Research Corp. (Atlanta).
"Acoustically decoupled MEMS devices" was invented by Farrokh Ayazi (Atlanta), Benoit Hamelin (Atlanta) and Jeremy Yang (Atlanta).
According to the abstract* released by the U.S. Patent & Trademark Office: "A resonator element of the monocrystalline 4H or 6H polytype of silicon carbide. A MEMS device including the resonator element and a substrate, wherein the resonator element and the substrate are not coplanar, and acoustic decoupling of the resonator element and the substrate is at least partially dependent upon a degree to which the resonator element and the substrate are not coplanar. A MEMS gyros...