ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,722,140, issued on Sept. 1, was assigned to Fujifilm Electronic Materials U.S.A. Inc. (Kingstown, R.I.).
"Systems and methods for purifying solvents" was invented by Stephen Earl Dyer (East Greenwich, R.I.), Brendan Thomas Lane (Middleborough, Mass.) and Patrick Adams Mahoney Sr. (North Kingstown, R.I.).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process."
The patent was filed on May 3, 2023, under Application No. 18/142,718.
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