ALEXANDRIA, Va., June 16 -- United States Patent no. 12,655,367, issued on June 16, was assigned to Fujifilm Electronic Materials U.S.A. Inc. (North Kingstown, R.I.).
"Cleaning compositions" was invented by Jieying Jiao (Chandler, Ariz.) and Thomas Dory (Gilbert, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "This disclosure relates to compositions for cleaning post etching residues on a semiconductor substrate, as well as related cleaning methods."
The patent was filed on April 26, 2023, under Application No. 18/139,380.
*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool....