US Patent Issued to Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e. V. on March 3 for "MEMS having a large fluidically effective surface" (German Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,565,416, issued on March 3, was assigned to Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e. V. (Munich).

"MEMS having a large fluidically effective surface" was invented by Sergiu Langa (Dresden, Germany), Holger Conrad (Dresden, Germany) and Bert Kaiser (Dresden, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "An MEMS comprising a substrate having a cavity includes a movable layer arrangement arranged in the cavity including a first beam, a second beam and a third beam that is arranged between the first beam and the second beam and that is fixed at discrete areas electrically insulated from the same. The movable layer arrangem...