ALEXANDRIA, Va., March 24 -- United States Patent no. 12,588,448, issued on March 24, was assigned to FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (Munich).
"Method for preparing a cross section with a focused ion beam" was invented by Susanne Beuer (Erlange, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "In a method for preparing a cross section in a substrate, a cut face is created in the substrate with at least one focused ion beam, wherein before and during the creation of the cut face a surface region of the substrate on the edge of the cut face is protected with a hardmask that is made from a doped semiconductor material, provided as a separate part, and positioned on t...