ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,160, issued on June 23, was assigned to Fractilia LLC (Austin, Texas).

"System and method for generating and analyzing roughness measurements and their use for process monitoring and control" was invented by Chris Mack (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, a method includes receiving measured linescan information describing a pattern structure of a feature, applying the received measured linescan information to an inverse linescan model that relates measured linescan information to feature geometry information, and identifying, based at least in part on the applying the received measured linescan model to t...