US Patent Issued to FEI on Sept. 22 for "Method and system for analyzing three-dimensional features" (Chinese, American Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,744,180, issued on Sept. 22, was assigned to FEI Co. (Hillsboro, Ore.).

"Method and system for analyzing three-dimensional features" was invented by Bingxing Wu (Shanghai), Zhenxin Zhong (Portland, Ore.) and Chunxiao Liu (Shandong, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "Multiple features in a sample are analyzed based on a first sample image of a first surface and a second sample image of a second surface. The first surface includes cross-sections of the multiple features, and the second surface includes cross-sections of the multiple features at different sample depths relative to the first surface. The second surface formed by milling t...