ALEXANDRIA, Va., April 15 -- United States Patent no. 12,604,700, issued on April 14, was assigned to EVATEC AG (Trubbach, Switzerland).
"Vacuum treatment apparatus and methods for manufacturing vacuum treated substrates" was invented by Marco Stupan (Ruggell, Liechtenstein), Lukas Epprecht (Klingnau, Switzerland), Alexander Gabathuler (Azmoos, Switzerland), Stefan Huggenberger (Riniken, Switzerland) and Benjamin Muller (Zurich, Switzerland).
According to the abstract* released by the U.S. Patent & Trademark Office: "The substrates supported in substrate holders are carried on holder carriers in a manner, that their extended surfaces are exposed to the surrounding atmosphere along an extended surface of the holder carriers. The holder car...