US Patent Issued to Eugenus on May 12 for "Precursor delivery system and method for high speed cyclic deposition" (California Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,624,443, issued on May 12, was assigned to Eugenus Inc. (San Jose, Calif.).

"Precursor delivery system and method for high speed cyclic deposition" was invented by Martin J. Salinas (Campbell, Calif.), Miguel Saldana (Santa Cruz, Calif.), Victor Calderon (Santa Clara, Calif.) and Santosh Narayan Ramachandra Kumar (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosed technology relates generally to semiconductor manufacturing, and more particularly to precursor delivery in cyclic deposition. In one aspect, a thin film deposition system comprises a thin film deposition chamber configured to deposit a thin film by alternatingly e...