US Patent Issued to EUGENE TECHNOLOGY on July 14 for "Batch type substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,683,129, issued on July 14, was assigned to EUGENE TECHNOLOGY Co. LTD. (South Korea).

"Batch type substrate processing apparatus" was invented by Jeong Hee Jo (Yongin-Si, South Korea) and Chang Dol Kim (Yongin-Si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a batch type substrate processing apparatus that supplies a process gas decomposed in a discharge space, which is distinguished from a processing space, into the processing space. The batch type substrate processing apparatus includes a reaction tube configured to provide a processing space, a plasma forming part having a discharge space, which is distinguished from the pro...