ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,555,755, issued on Feb. 17, was assigned to EUGENE TECHNOLOGY Co. LTD. (South Korea).
"Batch type substrate processing apparatus" was invented by Jeong Hee Jo (Yongin-si, South Korea) and Chang Dol Kim (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a batch type substrate processing apparatus that generates plasma by a plurality of electrodes to perform a processing process on a substrate. The batch type substrate processing apparatus includes a reaction tube, a plurality of electrodes, and an electrode protection part. The plurality of electrodes includes first and second power supply electrodes spaced apart from each...