US Patent Issued to EUGENE TECHNOLOGY on April 7 for "Substrate transfer device and substrate processing apparatus having the same" (South Korean Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,598,955, issued on April 7, was assigned to EUGENE TECHNOLOGY Co. LTD. (South Korea).

"Substrate transfer device and substrate processing apparatus having the same" was invented by Byoung Gyu Song (Yongin-si, South Korea), Hyeong Sik Ko (Seoul, South Korea), Hyeong Hwan Bae (Seongnam-si, South Korea) and Jun Jin Hyon (Gunpo-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a substrate transfer device for sensing deflection of an end-effector and a substrate processing apparatus having the same. The substrate transfer device includes: an end-effector extending in a first direction and supporting a substrate;...