ALEXANDRIA, Va., May 5 -- United States Patent no. 12,618,788, issued on May 5, was assigned to ETROLOGY LLC (Ore.).
"System and method for denoising a region of interest of a pattern" was invented by Vladislav Kaplan (Raanana, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method for denoising a grey scale image of a pattern on a substrate, including: scanning a gaussian beam consecutively across scanlines extending along an x direction, wherein the scan lines are disposed adjacent to each other in a y direction within a predetermined region of the pattern, obtaining waveforms from secondary electrons and backscattered electrons reflected from the scanned pattern; converting the waveform...