US Patent Issued to Entegris on Oct. 6 for "Precursors containing fluorinated alkoxides and amides" (Connecticut Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,753,198, issued on Oct. 6, was assigned to Entegris Inc. (Billerica, Mass.).

"Precursors containing fluorinated alkoxides and amides" was invented by Drew Michael Hood (Newtown, Conn.) and Thomas M. Cameron (Newtown, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to the field of precursors, more specifically precursors containing at least one fluorinated group. In some embodiments, the precursors are hafnium, zirconium, and titanium bis(cyclopentadienyl) precursors containing fluorinated alkoxides and amides. In some embodiments, the present disclosure relates to using precursors for deposition of group 4 containing t...