US Patent Issued to ENTEGRIS on March 31 for "Remote optimization of purge flow rates in a container" (Colorado, Minnesota Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,593,647, issued on March 31, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Remote optimization of purge flow rates in a container" was invented by Matthew A. Fuller (Colorado Springs, Colo.), Nathan Burget (Colorado Springs, Colo.), Katerina Alexe Reynolds (Colorado Springs, Colo.), Colton J. Harr (Monument, Colo.) and Michael C. Zabka (New Prague, Minn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Optimizing purge flow parameters in a substrate container, includes streaming a purge working fluid into an interior of the substrate container, discharging the purge working fluid from the interior of the substrate container, and varying purge flow p...