US Patent Issued to ENTEGRIS on March 17 for "Reticle pod having retention through reticle compartment wall" (Minnesota Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,636, issued on March 17, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Reticle pod having retention through reticle compartment wall" was invented by Russ V. Raschke (Chanhassen, Minn.), Pierce Laing (Orono, Minn.) and Anthony M. Tieben (Belle Plaine, Minn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reticle pod includes an outer portion that includes a pod door and a pod dome, and an inner portion including a baseplate and a cover. One of the baseplate or the cover includes a reticle compartment wall extending towards the other of the baseplate or cover. The reticle compartment wall includes one or more retaining features. The pod door o...