ALEXANDRIA, Va., July 16 -- United States Patent no. 12,668,603, issued on June 30, was assigned to Entegris Inc. (Billerica, Mass.).
"Functionalized organotin precursors and related methods" was invented by David M. Ermert (Danbury, Conn.), Thomas M. Cameron (Newtown, Conn.) and Claudia Fafard (New Milford, Conn.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Precursors useful in the formation of tin-containing films are provided. The precursors comprise a functionalized tin compound in which one or more ligands are coordinated to Sn, and the Sn is functionalized with at least one functional group. Methods for forming the precursors and methods for forming tin-containing films using the precursors are furth...