US Patent Issued to Entegris on June 16 for "Reticle container with directed purge flow" (Minnesota Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,656,674, issued on June 16, was assigned to Entegris Inc. (Billerica, Mass.).

"Reticle container with directed purge flow" was invented by Russ V. Raschke (Chanhassen, Minn.) and Brian Wiseman (Glencoe, Minn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reticle container includes an outer pod and an inner pod, the inner pod configured to contain a reticle. The outer pod includes a pod door including a purge port, and a pod dome including one or more channels configured to receive a purge gas from the purge port and direct the purge gas to particular locations within the outer pod. The channels can direct the purge gas to one or more filters of the i...