US Patent Issued to ENTEGRIS on Dec. 16 for "Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structures" (Massachusetts Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,500,109, issued on Dec. 16, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structures" was invented by Yan Liu (Lexington, Mass.), Jakub Rybczynski (Arlington, Mass.), Caleb Minsky (Medfield, Mass.) and Steven Donnell (Burlington, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described are electrostatic chuck devices that are useful to support a workpiece while processing the workpiece, upper ceramic layer components of electrostatic chuck assemblies, the upper ceramic layer having a deposited dielectric layer, a relatively smooth f...