US Patent Issued to ENTEGRIS on Aug. 25 for "Method and device to regulate purge into a container" (Colorado, Minnesota Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,097, issued on Aug. 25, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Method and device to regulate purge into a container" was invented by Matthew A. Fuller (Colorado Springs, Colo.), Mark V. Smith (Colorado Springs, Colo.), Shawn D. Eggum (Lonsdale, Minn.), Thomas H. Wilkie (Colorado Springs, Colo.), Colton J. Harr (Monument, Colo.) and Michael C. Zabka (New Prague, Minn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Substrate containers include purge flow distribution systems. The purge flow distribution systems can divide one or more input flows of purge gas to a plurality of gas distribution surfaces of a network of gas distribution devic...