US Patent Issued to ENKRIS SEMICONDUCTOR on Jan. 20 for "Wafer susceptor" (Chinese Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,529,140, issued on Jan. 20, was assigned to ENKRIS SEMICONDUCTOR INC. (Suzhou, China).

"Wafer susceptor" was invented by Kai Cheng (Suzhou, China) and Liyang Zhang (Suzhou, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a wafer susceptor. A groove bottom of the wafer susceptor is divided by a first dividing line passing through a center of a groove into a first region close to a center of the wafer susceptor and a second region away from the center of the wafer susceptor. The groove bottom includes a groove bottom surface and a convex structure formed on the groove bottom surface. An average height of the convex structure located in t...