ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,487,133, issued on Dec. 2, was assigned to Edwards Vacuum LLC (Sanborn, N.Y.).
"Detecting component temperature in a system" was invented by Budd Edward Faulkner (Hillsboro, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a method of detecting the temperature of a component of a support system for semiconductor processing equipment, the method comprising: applying a radio frequency identity tag to the component, the radio frequency identity tag having a serial number; reading the radio frequency identity tag with a reader, the reader arranged to read the serial number of the radio frequency identity tag, and to identify the resonant...